Table of Contents
Focused Ion Beam Workshop
Working with a FIB-SEM? Preparing TEM lamellae, APT samples or micro pillars for in situ experiments? Are you wondering about the quality of your FIB-SEM prepared samples? Unsure how to best thin your TEM-lamellae? Does your sample have the desired quality? Worried or unsure about FIB induced artifacts? This workshop is for you.
Learn how you can tackle difficult FIB projects.
The workshop will start off with an overview on a possible approach to challenging samples and motivate why a sound knowledge of ion-solid interactions is required to avoid FIB induced artifacts and to improve FIB prepared sample quality. From there, the workshop will take you into the world of ion solid interactions. Discover how the ion-solid interactions induce artifacts and what approaches you can use to avoid/interpret them to improve your FIB prepared sample quality. Or maybe you get inspired to use the FIB induced artifacts to design future materials. Need to avoid FIB induced heat damage? Approaches on working safely with thermally low conductive materials are discussed.
A main focus of the workshop will be TEM lamella preparation (however, the ion solid interactions and hands on Monte Carlo simulation practices can be applied to nanofabrication and other FIB processes as well). Did you know that the mostly used FIB recipes for TEM lamella preparation are really optimized for Si? Learn, how you can design the TEM lamella preparation process for your materials to improve TEM lamella quality. The workshop will show you how to use Monte Carlo simulations (combined approach using SRIM and CASINO) to simulate TEM lamella thickness and amorphous layer thickness for your materials. All you need to do is bring your laptop with SRIM and CASINO installed. Basic exercises at the start of the hands on session after lunch will help you develop the skills to then simulate your own materials of choice during the second part of the hands on workshop.
Workshop presenters
- Dr Lena Wolff –– FIB/SEM/TEM application specialist at AXT
- Dr Anders Barlow –— Academic specialist and industry lead at The University of Melbourne
Date and time
The all-day workshop will be held on Monday the 9th of February, starting at 9:00am.
Location
Reid Room, Level 1, Bld 125, Western Precinct, CSIRO Clayton Site, Research Way, Clayton. Go to CSIRO Western reception.